Wide field system at Ultratech

Linda Haywood

doi:10.1117/12.3011871

11 October 2023 Wide field system at Ultratech

Linda Haywood

Proceedings Volume 12808, Bay Area Chrome Users Society Symposium 1984; 1280805 (2023) https://doi.org/10.1117/12.3011871
Event: 4th Annual BACUS Symposium, 1984, Santa Clara, CA, United States

Abstract

Ultratech has been in the 1X stepper business for about three or four years now. A lot of you have probably either made the reticles or used them. Our lens design is quite unique. It's called a 'Wind Dyson' design. It's a five-element design. That's the entire lens.

Citation Download Citation

Linda Haywood "Wide field system at Ultratech", Proc. SPIE 12808, Bay Area Chrome Users Society Symposium 1984, 1280805 (11 October 2023); https://doi.org/10.1117/12.3011871

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