Novel anti-reflective coatings for improved dimension control

Randy Wathan

doi:10.1117/12.3011877

11 October 2023 Novel anti-reflective coatings for improved dimension control

Randy Wathan

Proceedings Volume 12808, Bay Area Chrome Users Society Symposium 1984; 128080A (2023) https://doi.org/10.1117/12.3011877
Event: 4th Annual BACUS Symposium, 1984, Santa Clara, CA, United States

Abstract

Good afternoon! My paper today is on the subject of Novel Anti-reflective Coatings for Improved Critical Dimension Control. I will be speaking on the advantages and disadvantages or reflection control films, and the results of studies on critical dimension control as a function of chromium film thickness, uniformity, and reflectivity of mask blanks.

Citation Download Citation

Randy Wathan "Novel anti-reflective coatings for improved dimension control", Proc. SPIE 12808, Bay Area Chrome Users Society Symposium 1984, 128080A (11 October 2023); https://doi.org/10.1117/12.3011877

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