Evaluation of commercial e-beam resist in Japan

Yoichi Takahashi

doi:10.1117/12.3011868

11 October 2023 Evaluation of commercial e-beam resist in Japan

Yoichi Takahashi

Proceedings Volume 12808, Bay Area Chrome Users Society Symposium 1984; 1280803 (2023) https://doi.org/10.1117/12.3011868
Event: 4th Annual BACUS Symposium, 1984, Santa Clara, CA, United States

Abstract

In this paper, I will report basic properties and process evaluation of commercially available electron beam resists in Japan. Furthermore, I will give an outline of the trends of reasearch and development of electron beam resists for mask making.

Citation Download Citation

Yoichi Takahashi "Evaluation of commercial e-beam resist in Japan", Proc. SPIE 12808, Bay Area Chrome Users Society Symposium 1984, 1280803 (11 October 2023); https://doi.org/10.1117/12.3011868

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