A new laser based raster scan pattern generator

Sven Lofquist; Gerhard Westerberg

doi:10.1117/12.3012003

12 October 2023 A new laser based raster scan pattern generator

Sven Lofquist, Gerhard Westerberg

Proceedings Volume 12812, Bay Area Chrome Users Society Symposium 1988; 128120H (2023) https://doi.org/10.1117/12.3012003
Event: 8th Annual BACUS Symposium, 1988, Sunnyvale, CA, United States

Abstract

This paper reports on the development of a laserbased raster scan pattern generator for the production of reticles and micromasks. The system exposes the standard optical resist coated maskblanks by utilizing a single HeCd laser beam. High throughput is achieved by using a microsweep that is generated by an acousto optical deflector. The basic design of a very compact and simple pattern generation system with state of the art speed and performance will be discussed.

Citation Download Citation

Sven Lofquist and Gerhard Westerberg "A new laser based raster scan pattern generator", Proc. SPIE 12812, Bay Area Chrome Users Society Symposium 1988, 128120H (12 October 2023); https://doi.org/10.1117/12.3012003

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