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This paper reports on the development of a laserbased raster scan pattern generator for the production of reticles and micromasks. The system exposes the standard optical resist coated maskblanks by utilizing a single HeCd laser beam. High throughput is achieved by using a microsweep that is generated by an acousto optical deflector. The basic design of a very compact and simple pattern generation system with state of the art speed and performance will be discussed.
Sven Lofquist andGerhard Westerberg
"A new laser based raster scan pattern generator", Proc. SPIE 12812, Bay Area Chrome Users Society Symposium 1988, 128120H (12 October 2023); https://doi.org/10.1117/12.3012003
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Sven Lofquist, Gerhard Westerberg, "A new laser based raster scan pattern generator," Proc. SPIE 12812, Bay Area Chrome Users Society Symposium 1988, 128120H (12 October 2023); https://doi.org/10.1117/12.3012003