Open Access Paper
27 March 2024 Front Matter: Volume 12899
Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 1289901 (2024) https://doi.org/10.1117/12.3030048
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 12899, including the Title Page, Copyright information, Table of Contents, and Conference Committee information.

The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org.

The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from these proceedings: Author(s), “Title of Paper,” in MOEMS and Miniaturized Systems XXIII, edited by Hans Zappe, Wibool Piyawattanametha, Yong-Hwa Park, Proc. of SPIE 12899, Seven-digit Article CID Number (DD/MM/YYYY); (DOI URL).

ISSN: 0277-786X

ISSN: 1996-756X (electronic)

ISBN: 9781510670587

ISBN: 9781510670594 (electronic)

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Copyright © 2024 Society of Photo-Optical Instrumentation Engineers (SPIE).

Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of fees. To obtain permission to use and share articles in this volume, visit Copyright Clearance Center at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher.

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Publication of record for individual papers is online in the SPIE Digital Library.

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Paper Numbering: A unique citation identifier (CID) number is assigned to each article in the Proceedings of SPIE at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a seven-digit CID article numbering system structured as follows:

  • The first five digits correspond to the SPIE volume number.

  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript.

Conference Committee

Symposium Chairs

  • Ulrich T. Schwarz, Technische Universität Chemnitz (Germany)

  • Karin Hinzer, University of Ottawa (Canada)

Symposium Co-chairs

  • Sonia M. García-Blanco, Universiteit Twente (Netherlands)

  • Bernd Witzigmann, Friedrich-Alexander-Universität Erlangen-Nürnberg (Germany)

Program Track Chair

  • Georg von Freymann, Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau (Germany)

Conference Chairs

  • Hans Zappe, University of Freiburg (Germany)

  • Wibool Piyawattanametha, King Mongkut’s Institute of Technology Ladkrabang (Thailand) and Michigan State University (United States)

  • Yong-Hwa Park, KAIST (Korea, Republic of)

Conference Program Committee

  • Robert Brunner, Ernst-Abbe-Hochschule Jena (Germany)

  • David L. Dickensheets, Montana State University (United States)

  • Kristinn B. Gylfason, KTH Royal Institute of Technology (Sweden)

  • Sangyoon Han, Daegu Gyeongbuk Institute of Science & Technology (Korea, Republic of)

  • Ki-Hun Jeong, KAIST (Korea, Republic of)

  • Diaa A.M. Khalil, Ain Shams University (Egypt) and Si-Ware Systems (Egypt)

  • Jaeyoun Kim, Iowa State University of Science and Technology (United States)

  • Hui Min Leung, University of Colorado Boulder (United States)

  • David G. Lishan, Plasma-Therm LLC (United States)

  • Veljko Milanovic, Mirrorcle Technologies, Inc. (United States)

  • Jeroen Missinne, Universiteit Gent (Belgium) and imec (Belgium)

  • Heidi Ottevaere, Vrije Universiteit Brussel (Belgium)

  • Yves-Alain Peter, Polytechnique Montréal (Canada)

  • Zhen Qiu, Michigan State University (United States)

  • Niels Quack, The University of Sydney (Australia)

  • Thilo Sandner, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)

  • Young Min Song, Gwangju Institute of Science and Technology (Korea, Republic of)

  • Hamdi Torun, Northumbria University (United Kingdom)

  • Xiaoke Yi, The University of Sydney (Australia)

  • Frédéric Zamkotsian, Laboratoire d’Astrophysique de Marseille (France)

  • Guangya Zhou, National University of Singapore (Singapore)

© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 12899", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 1289901 (27 March 2024); https://doi.org/10.1117/12.3030048
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KEYWORDS
Microelectromechanical systems

Space mirrors

Micromirrors

LIDAR

Miniaturization

Modeling

Motion measurement

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