Fabrication of 3D microstructures by controlled bending of suspended microdisks

R. Feougier; A. Aliane; A. Sarrazin; Z. Mehrez; N. Posseme; R. Tiron

doi:10.1117/12.3009898

9 April 2024 Fabrication of 3D microstructures by controlled bending of suspended microdisks

R. Feougier, A. Aliane, A. Sarrazin, Z. Mehrez, N. Posseme, R. Tiron

Proceedings Volume 12956, Novel Patterning Technologies 2024; 129560K (2024) https://doi.org/10.1117/12.3009898
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

Hierarchical structures that combine microlens arrays and nanostructures exhibit exceptional potential in enhancing optical characteristics of optoelectronic devices. Furthermore, multi-scale architectures confer multifunctional capabilities to these devices. Existing methodologies for creating hierarchical structures can be classified by the initial structure fabricated: the "microfirst" and "nanofirst" approaches. Among these, the nanofirst strategy stands out as the most versatile, despite presenting challenges in 3D micropatterning on existing nanostructured surfaces. However, it leads to a greater challenge involving 3D micropatterning on existing nanostructured surfaces. To address this challenge, we propose a novel technique for fabricating hierarchical 3D microstructures through controlled bending of suspended microdisks. This method offers new perspectives on achieving hierarchical structures and 3D microstructures.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

R. Feougier, A. Aliane, A. Sarrazin, Z. Mehrez, N. Posseme, and R. Tiron "Fabrication of 3D microstructures by controlled bending of suspended microdisks", Proc. SPIE 12956, Novel Patterning Technologies 2024, 129560K (9 April 2024); https://doi.org/10.1117/12.3009898

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