Deposition of thin films on hybrid-polymer 3D micro-optics using atomic layer deposition

D. Astrauskytė; K. Galvanauskas; D. Gailevičius; M. Drazdys; M. Malinauskas; L. Grineviciute

doi:10.1117/12.3017633

24 June 2024 Deposition of thin films on hybrid-polymer 3D micro-optics using atomic layer deposition

D. Astrauskytė, K. Galvanauskas, D. Gailevičius, M. Drazdys, M. Malinauskas, L. Grineviciute

Author Affiliations +

Proceedings Volume 13020, Advances in Optical Thin Films VIII; 1302002 (2024) https://doi.org/10.1117/12.3017633
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Anti-reflective (AR) coatings are widely utilized to minimize reflections from optical components. Laser direct writing (LDW) is employed to fabricate complex and multi-level micro-optical elements, such as micro-triplets. Conventional physical vapor deposition methods are insufficient to produce conformal coatings on complex shape and stacked substrates. The atomic layer deposition (ALD) technique offers a promising solution for achieving conformal coatings on free-form components. In this work, we demonstrate the deposition of an AR coating by ALD on LDW-fabricated microstructures and micro-lenses. The ALD-deposited AR coating successfully reduced reflection from 3.3% to 0.1% at 633 nm for one surface of SZ2080.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

D. Astrauskytė, K. Galvanauskas, D. Gailevičius, M. Drazdys, M. Malinauskas, and L. Grineviciute "Deposition of thin films on hybrid-polymer 3D micro-optics using atomic layer deposition", Proc. SPIE 13020, Advances in Optical Thin Films VIII, 1302002 (24 June 2024); https://doi.org/10.1117/12.3017633

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