Advances in direct monochromatic monitoring for the DUV range

Detlef Arhilger; Harro Hagedorn; Alfons Zöller

doi:10.1117/12.3021834

24 June 2024 Advances in direct monochromatic monitoring for the DUV range

Detlef Arhilger, Harro Hagedorn, Alfons Zöller

Proceedings Volume 13020, Advances in Optical Thin Films VIII; 130200Q (2024) https://doi.org/10.1117/12.3021834
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Monochromatic monitoring by intermittent measuring technique is established as a standard optical thickness control for thin films in box coaters since 2005. A newly developed set-up of the optical path was designed for the Syruspro 1100 DUV box-coater series. A deuterium lamp in combination with an achromatic lens system extends the monitoring capabilities to the UV range for wavelengths from 200nm up to 380nm. We present the hardware set-up and coating results for various DUV coatings.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Detlef Arhilger, Harro Hagedorn, and Alfons Zöller "Advances in direct monochromatic monitoring for the DUV range", Proc. SPIE 13020, Advances in Optical Thin Films VIII, 130200Q (24 June 2024); https://doi.org/10.1117/12.3021834

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