Precision inspection of micro-components surfaces by moiré interferometry

S. Meguellati

doi:10.1117/12.3014623

17 June 2024 Precision inspection of micro-components surfaces by moiré interferometry

S. Meguellati

Proceedings Volume 13021, Optical Fabrication and Testing VIII; 130210M (2024) https://doi.org/10.1117/12.3014623
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Conference Poster

Abstract

The technique proposed in this paper provides inspection of functional surfaces quality of micro-components by nondestructive testing, with high resolution and increased sensitivity. The control is done in real time and instantaneously on all inspected surface. Component geometry accuracy is one of parameters which influences, function accuracy. Moiré topography is full-field optical technique in which the shape of object surfaces is measured by means of moiré interferometry. The technique has found various applications in diverse fields, from biomedical to industrial and scientific applications. In many industrial optical metrology applications, contactless and nondestructive shape measurement is a desirable tool for, quality control and contour mapping. on surfaces that are of the order of few mm² and more. Optical device used allows a significant dimensional surface magnification of up to 1000 times the area inspected, which allows easy processing and reaches an exceptional nanometric imprecision of measurements.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

S. Meguellati "Precision inspection of micro-components surfaces by moiré interferometry", Proc. SPIE 13021, Optical Fabrication and Testing VIII, 130210M (17 June 2024); https://doi.org/10.1117/12.3014623

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