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18 March 2024 Research progress of high-precision polishing technology on optical diamond material surface
Xiaojing Li, Xiangyang Zhang, Alexander Anokhin, Yunlong Bai, Yan Lei, Xiaodong Bai, Hang Zhu, Kai Jiang, Ping Hu
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Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131040A (2024) https://doi.org/10.1117/12.3016126
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China
Abstract
Central to future optical device developments in diamond is the provision of smooth, low defect density substrate materials. Research progress of optical diamond material surface polishing technology were comprehensively reviewed, the polishing effect and the advantages and disadvantages of the current high-usage polishing methods were introduced, including mechanical polishing, thermal chemical polishing, chemical auxiliary mechanical polishing, laser polishing, plasma treatments etc. The generation of composite polishing technology helps to improve the deficiencies of the original polishing technology and obtain a smaller surface roughness, which is the main research direction at present. Super ultra-precision and high quality on optical diamond surface is the technical development trend in future. A new no contacting method of polishing optical diamond using ion beam was proposed in this paper, which has great application potential because of its advantage of super ultra-precision and no damage.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Xiaojing Li, Xiangyang Zhang, Alexander Anokhin, Yunlong Bai, Yan Lei, Xiaodong Bai, Hang Zhu, Kai Jiang, and Ping Hu "Research progress of high-precision polishing technology on optical diamond material surface", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131040A (18 March 2024); https://doi.org/10.1117/12.3016126
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KEYWORDS
Polishing
Diamond
Surface finishing
Optical surfaces
Ion beams
Pulsed laser operation
Chemical vapor deposition
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