Exploring high-NA EUV mask specification for logic metal

Kenichi Miyaguchi; Soobin Hwang; Apoorva Oak; Ryoung-han Kim

doi:10.1117/12.3035717

26 August 2024 Exploring high-NA EUV mask specification for logic metal

Kenichi Miyaguchi, Soobin Hwang, Apoorva Oak, Ryoung-han Kim

Proceedings Volume 13177, Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology; 131770G (2024) https://doi.org/10.1117/12.3035717
Event: Photomask Japan 2024, 2024, Yokohama, Japan

Abstract

We explore high Numerical Aperture (NA) Extreme Ultraviolet (EUV) mask specification for logic metal layer targeting A7 node. A requirement of minimum Critical Dimension (CD) of absorber on mask is investigated by Source Mask Optimization (SMO) and wafer printing simulation for pitch 20nm logic metal pattern in a horizontal direction. The Sub-Resolution Assist Feature (SRAF) horizontal absorber line width needs to be less than 4nm (1X) to avoid being printed on wafer. A minimum absorber line end tip-to-tip is also explored as a key metrics of high NA single patterning limit in Bright-Field (BF) mask with a benefit of low-n attenuated phase-shift mask.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Kenichi Miyaguchi, Soobin Hwang, Apoorva Oak, and Ryoung-han Kim "Exploring high-NA EUV mask specification for logic metal", Proc. SPIE 13177, Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology, 131770G (26 August 2024); https://doi.org/10.1117/12.3035717

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available