Paper
15 November 2024 An ultrasensitive 3D-printed nano mechanics sensor
Xilin Long, Bozhe Li, Hairong Zheng, Shanshan Liang
Author Affiliations +
Abstract
High-precision mechanical sensors are critical for devices and systems with extremely high accuracy. By combining the mechanical and optical properties of specific materials, it is possible to fabricate sensors that meet specific performance requirements by using ultraprecise micro/nano fabrication, and optical sensing methods. In this work, we introduce a probe fabricated on the end face of an optical fiber using two-photon polymerization 3D printing technology. The 3D-printed probe and the optical fiber form a Fabry–Pérot cavity, which converts the minute mechanical signals received by the probe into optical signals for demodulation. The sensitivity of the probe depends on the material properties, structure, and sizes. The material we used has a lower Young’s modulus than normal 3D-printing photoresist, so the probe could achieve higher resolution. Depending on the specific requirements of different application conditions, various materials and different designs for 3D printing can be selected. The structure of this nano-mechanics sensor was demonstrated in this work. We also conducted mechanical testing on it. The verification results show that the sensor achieves an ultra-high resolution. The optical fiber nano-mechanics sensor that shows high force resolution has potential for high accuracy measurement applications, and the results reveal a potential design strategy for special optical probes with unique physical properties.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Xilin Long, Bozhe Li, Hairong Zheng, and Shanshan Liang "An ultrasensitive 3D-printed nano mechanics sensor", Proc. SPIE 13234, Advanced Laser Processing and Manufacturing VIII, 132340G (15 November 2024); https://doi.org/10.1117/12.3036136
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KEYWORDS
Sensors

3D printing

Photoresist materials

Optical fibers

Two photon polymerization

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