Ultra-thin ZnO/pedot-pss heterojunction increases sensitivity of ZnO-film-based pressure sensors

Junlong Huang; Guangzhong Xie; Xiangdong Xu; Yadong Jiang

doi:10.1117/12.3046611

27 September 2024 Ultra-thin ZnO/pedot-pss heterojunction increases sensitivity of ZnO-film-based pressure sensors

Junlong Huang, Guangzhong Xie, Xiangdong Xu, Yadong Jiang

Author Affiliations +

Proceedings Volume 13261, Tenth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024); 132611E (2024) https://doi.org/10.1117/12.3046611
Event: 10th International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024), 2024, Wuhan, China

Abstract

To perform monitoring tasks while being comfortable to wear, flexible resistive pressure sensors need to be ultra-thin to avoid sensory irritation from the fit of the device. However, thinning high-performance deformation-affected pressure sensors leads to a decrease in sensitivity due to finite deformation, whereas sensors based on carrier concentration changes are accompanied by low sensitivity due to finite lattice distortion. A ZnO film pressure sensor based on the variation of carrier concentration was prepared by thermal decomposition of zinc acetate, which has a low sensitivity of 0.0296 kPa^-1 due to the limited variation of the distance between the clusters of ZnO molecules. The introduction of ultra-thin ZnO/pedot-pss heterojunctions adds almost negligible thickness to the ZnO film, increasing the sensitivity of the device to 0.1552 kPa^-1. The results show that an appropriate reverse bias voltage to increase the height of the depletion region barrier in the initial state of the device can enhance the sensitivity. However, a higher reverse bias voltage destroys the very thin depletion region barrier formed by van der Waals forces, leading to a decrease in device sensitivity. This work introduces the variation of depletion region barriers with pressure into flexible pressure sensors, providing a new idea for the preparation of ultrathin high-performance flexible resistive pressure sensors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Junlong Huang, Guangzhong Xie, Xiangdong Xu, and Yadong Jiang "Ultra-thin ZnO/pedot-pss heterojunction increases sensitivity of ZnO-film-based pressure sensors", Proc. SPIE 13261, Tenth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024), 132611E (27 September 2024); https://doi.org/10.1117/12.3046611

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KEYWORDS

Zinc oxide

Sensors

Heterojunctions

Piezoresistivity

Deformation

Film thickness

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