Paper
27 September 2024 Prediction model of material removal rate and surface roughness for silicon single crystal EDM
Xincheng Yin, Haiwang Liu, Yuhang Zhou, Youliang Wang, Shujuan Li
Author Affiliations +
Proceedings Volume 13261, Tenth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024); 132612W (2024) https://doi.org/10.1117/12.3046639
Event: 10th International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024), 2024, Wuhan, China
Abstract
To solve the problem that the material removal rate and surface roughness can not be accurately predicted in electrical discharge machining (EDM), the temperature field, melting and solidification process of silicon single crystal in single pulse EDM are simulated, and the morphology and size of a single erosion crater is obtained. The predicted values for surface roughness (SR) and material removal rate (MRR) of machined silicon single crystal are derived from calculations using a continuous pulse discharge model. Experimental results indicate that the relative error between the predicted and experimental values for the MRR is 5.4%, and the relative error for the surface root mean square roughness is 6.2%, which verifies the accuracy of the model.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Xincheng Yin, Haiwang Liu, Yuhang Zhou, Youliang Wang, and Shujuan Li "Prediction model of material removal rate and surface roughness for silicon single crystal EDM", Proc. SPIE 13261, Tenth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2024), 132612W (27 September 2024); https://doi.org/10.1117/12.3046639
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KEYWORDS
Silicon

Crystals

Corrosion

Surface roughness

Heat flux

Electrodes

3D modeling

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