Adaptive temperature control system for vertical heater based on PLC intelligent model conversion

Jinlong Zhu; Bingzhi Liu; Enzhe Song; Yulong Wang

doi:10.1117/12.3037488

27 September 2024 Adaptive temperature control system for vertical heater based on PLC intelligent model conversion

Jinlong Zhu, Bingzhi Liu, Enzhe Song, Yulong Wang

Author Affiliations +

Proceedings Volume 13275, Sixth International Conference on Information Science, Electrical, and Automation Engineering (ISEAE 2024); 132753Z (2024) https://doi.org/10.1117/12.3037488
Event: 6th International Conference on Information Science, Electrical, and Automation Engineering (ISEAE 2024), 2024, Wuhan, China

Abstract

In response to the shortcomings of temperature control precision, limited automation, and relatively error-prone information management in the wafer production vertical heater control system of semiconductor factories, an intelligent temperature control system based on PLC control was designed. To enhance the system's level of intelligence, enabling accurate temperature adjustments in any temperature range, a Simulink control model based on a neural network adaptive PID was devised. The model is then transformed and imported into the PLC device. A comparative analysis between the newly designed control model and the traditional self-tuning PID controller of PLC is conducted, and simulation results demonstrated the superiority of the neural network adaptive PID controller over the traditional PLC PID controller. The robustness and efficiency of the novel industrial PLC temperature control system proposed in this paper are validated through dual simulation verification using MATLAB and TIA Portal.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jinlong Zhu, Bingzhi Liu, Enzhe Song, and Yulong Wang "Adaptive temperature control system for vertical heater based on PLC intelligent model conversion", Proc. SPIE 13275, Sixth International Conference on Information Science, Electrical, and Automation Engineering (ISEAE 2024), 132753Z (27 September 2024); https://doi.org/10.1117/12.3037488

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