Laser processing of channel waveguide structures in sol-gel coatings

Brian D. Fabes; Douglas J. Taylor; Lori Weisenbach; M. M. Stuppi; D. L. Klein; Lenette Joy Raymond; Brian J.J. Zelinski; Dunbar P. Birnie III

doi:10.1117/12.22570

1 November 1990 Laser processing of channel waveguide structures in sol-gel coatings

Brian D. Fabes, Douglas J. Taylor, Lori Weisenbach, M. M. Stuppi, D. L. Klein, Lenette Joy Raymond, Brian J.J. Zelinski, Dunbar P. Birnie III

Author Affiliations +

Proceedings Volume 1328, Sol-Gel Optics; (1990) https://doi.org/10.1117/12.22570
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Sol-gel derived silica, siica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 jim). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index ofrefraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densifled and furnace densified silica coatings were similar. Large differences were observed in the indicies oflaser and furnace densified coatings for the siica-titania and tantala systems.

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Brian D. Fabes, Douglas J. Taylor, Lori Weisenbach, M. M. Stuppi, D. L. Klein, Lenette Joy Raymond, Brian J.J. Zelinski, and Dunbar P. Birnie III "Laser processing of channel waveguide structures in sol-gel coatings", Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); https://doi.org/10.1117/12.22570

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