Research on the control technology of PSD2 index for the 3mm ultrathin large aperture optical components

Ying Huang; Fang Zhao; Jiangchuan Hu; Jie Liu

doi:10.1117/12.3046243

13 November 2024 Research on the control technology of PSD2 index for the 3mm ultrathin large aperture optical components

Ying Huang, Fang Zhao, Jiangchuan Hu, Jie Liu

Author Affiliations +

Proceedings Volume 13280, Advanced Optical Manufacturing Technologies and Applications 2024; and Fourth International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2024); 132800D (2024) https://doi.org/10.1117/12.3046243
Event: Second Conference on Advanced Optical Manufacturing Technologies and Applications & Fourth Forum of Young Scientists on Advanced Optical Manufacturing, 2024, Xi'an, China

Abstract

The PSD2 index of 3mm ultrathin large aperture optical components is difficult to converge effectively, which is influenced by various factors. In order to solve the problem, the measurement results of the PSD2 index were analyzed in two parts. One part was the results of the PSD2 index after removing the defocus and astigmatism, which we used to evaluate the impact of intermediate frequency errors. The other part was the surface shape PV value of the measurement area, which we used to evaluate the impact of low frequency errors. In the double-side polishing stage, the oscillating smooth polishing technology was used to smooth intermediate frequency errors of the optical surface, which eliminated the fine ripples in the PSD2 processing results. The surface shape local correction technology was used to improve the surface shape PV value of the measurement area. Through the synchronous control of the intermediate frequency and low frequency errors, the PSD2 index control for the whole surface of the optical components was realized. The RMS value of the the PSD2 index was converged from 1.38nm to 0.70nm on average.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ying Huang, Fang Zhao, Jiangchuan Hu, and Jie Liu "Research on the control technology of PSD2 index for the 3mm ultrathin large aperture optical components", Proc. SPIE 13280, Advanced Optical Manufacturing Technologies and Applications 2024; and Fourth International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2024), 132800D (13 November 2024); https://doi.org/10.1117/12.3046243

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KEYWORDS

Optical surfaces

Surface finishing

Optical components

Polishing

Deformation

Wavefront errors

Spatial frequencies

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