Way to nanogrinding technology

Masakazu Miyashita

doi:10.1117/12.22785

1 November 1990 Way to nanogrinding technology

Masakazu Miyashita

Proceedings Volume 1333, Advanced Optical Manufacturing and Testing; (1990) https://doi.org/10.1117/12.22785
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Precision finishing process of hard and brittle material components such as single crystal silicon wafer and magnetic head consists of lapping and polishing which depend too much on skilled labor. This process is based on the traditional optical production technology and entirely different from the automated mass production technique in automobile production. Instead of traditional lapping and polishing, the nanogrinding is proposed as a new stock removal machining to generate optical surface on brittle materials. By this new technology, the damage free surface which is the same one produced by lapping and polishing can be obtained on brittle materials, and the free carvature can also be generated on brittle materials. This technology is based on the motion copying principle which is the same as in case of metal parts machining. The new nanogrinding technology is anticipated to be adapted as the machining technique suitable for automated mass production, because the stable machining on the level of optical production technique is expected to be obtained by the traditional lapping and polishing.

Citation Download Citation

Masakazu Miyashita "Way to nanogrinding technology", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22785

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