Vacuum nanoscale carbon coatings

Valery Savulyak; Leeonid Polichuk; Gao Cinan; Vladimir Grimashevich; Zlata Bondarenko; Viktoriia Voitko; Piotr Kisała; Jacek Klimek; Bakhyt Yeraliyeva

doi:10.1117/12.3054881

16 December 2024 Vacuum nanoscale carbon coatings

Valery Savulyak, Leeonid Polichuk, Gao Cinan, Vladimir Grimashevich, Zlata Bondarenko, Viktoriia Voitko, Piotr Kisała, Jacek Klimek, Bakhyt Yeraliyeva

Author Affiliations +

Proceedings Volume 13400, Photonics Applications in Astronomy, Communications, Industry, and High Energy Physics Experiments 2024; 134000L (2024) https://doi.org/10.1117/12.3054881
Event: Photonics Applications in Astronomy, Communications, Industry, and High Energy Physics Experiments 2024, 2024, Lublin, Poland

Abstract

This article illustrates the problem ensuring homogeneity and uniformity of nanoscale coatings obtained in vacuum by carbon vapor deposition. Carbon vapors are obtained by heating in a vacuum with one or more electron beams from a water-cooled crucible, which is covered with a molten layer of refractory metal. Due to the peculiarities of the trajectory of the movement of carbon vapors from the crucible to the substrate, a situation may arise with the formation of a "visor" type defect on the coating, which prevents the uniformity of the coating.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Valery Savulyak, Leeonid Polichuk, Gao Cinan, Vladimir Grimashevich, Zlata Bondarenko, Viktoriia Voitko, Piotr Kisała, Jacek Klimek, and Bakhyt Yeraliyeva "Vacuum nanoscale carbon coatings", Proc. SPIE 13400, Photonics Applications in Astronomy, Communications, Industry, and High Energy Physics Experiments 2024, 134000L (16 December 2024); https://doi.org/10.1117/12.3054881

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