Construction and implementation of single substrate for multiparameter surface acoustic wave measurement sensor

Chuansheng Luo; Chunlei Li; Linli Cui; Zhengyuxi Su; Shufeng Xu; Lei Huang

doi:10.1117/12.3052716

12 December 2024 Construction and implementation of single substrate for multiparameter surface acoustic wave measurement sensor

Chuansheng Luo, Chunlei Li, Linli Cui, Zhengyuxi Su, Shufeng Xu, Lei Huang

Author Affiliations +

Proceedings Volume 13446, Sixth International Conference on Optoelectronic Science and Materials (ICOSM 2024); 1344616 (2024) https://doi.org/10.1117/12.3052716
Event: 6th International Conference on Optoelectronic Science and Materials (ICOSM 2024), 2024, Hefei, China

Abstract

Based on measuring principle of surface acoustic wave(saw) technology, the paper introduces saw delay line and SAW-RFID sensor associated with demand for multiple parameter measurement. Presents single chip structure based saw delay line for multiple parameter test and further with focus on discussing interpretation method of time series obtained from transformation of reflection coefficient of sweeping frequency measures. Sweeping bandwidth and FFT data length are discussed as crucial for obtaining clear reflection peaks on time domain plots. Finally, experienced specification which suggests designing single SAW substrate is presented.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chuansheng Luo, Chunlei Li, Linli Cui, Zhengyuxi Su, Shufeng Xu, and Lei Huang "Construction and implementation of single substrate for multiparameter surface acoustic wave measurement sensor", Proc. SPIE 13446, Sixth International Conference on Optoelectronic Science and Materials (ICOSM 2024), 1344616 (12 December 2024); https://doi.org/10.1117/12.3052716

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