An error analysis of the Wyko TOPO noncontact surface profiler

Van A. Hodgkin

doi:10.1117/12.2294433

1 November 1990 An error analysis of the Wyko TOPO noncontact surface profiler

Van A. Hodgkin

Proceedings Volume 1438, Laser-Induced Damage in Optical Materials 1989; 14380O (1990) https://doi.org/10.1117/12.2294433
Event: Laser-Induced Damage in Optical Materials 1989, 1989, Boulder, CO, United States

Abstract

An increasingly important tool in the characterization and measurement of optical materials and components in the Wyko TOPO Noncontact Surface Profiler. Optically, it consists of a low- to medium- power microscope in which the objective, depending upon the power, is a visible light interferometer of either Michelson, Mireau, or Linnik design. By integrating a detector array into the viewing system and attaching the reference arm of the interferometer to a piezoelectric transducer, the technique of surface profiling by phase shifting is accomplished by computer. The potential utility of this system to the investigator interested in the fundamental mechanisms of laser-induced damage is enormous, provided that the user is aware of its proper use and limitations. This paper is intended to act as a user's guide to the TOPO system in such cases and to document its precision and accuracy limitations given a variety of surface types and measurement configurations.

Citation Download Citation

Van A. Hodgkin "An error analysis of the Wyko TOPO noncontact surface profiler", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 14380O (1 November 1990); https://doi.org/10.1117/12.2294433

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