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Vanadium dioxide thin film that has semiconductor-to-metal phase transition has been obtained by either reactive evaporation or reactive ion assisted deposition with subsequent annealing processes. Various kinds of measurement methods have been developed in investigation of phase transition properties of vanadium dioxide films. It is observed that the performance of phase transition properties strongly depends upon the stoichiometric and crystalline characteristics of the thin film.
Jiancun Gao,Zhi Hong Lin, andLiying Han
"Study of phase transition VO2 thin film", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47275
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Jiancun Gao, Zhi Hong Lin, Liying Han, "Study of phase transition VO2 thin film," Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47275