Development of the toroidal surface measuring system

Hiroyuki Suhara; Nobuo Sakuma; Seizoh Suzuki; T. Ohsawa; Shin Tsuyuzaki; Satoru Toyooka

doi:10.1117/12.134849

1 January 1992 Development of the toroidal surface measuring system

Hiroyuki Suhara, Nobuo Sakuma, Seizoh Suzuki, T. Ohsawa, Shin Tsuyuzaki, Satoru Toyooka

Proceedings Volume 1531, Advanced Optical Manufacturing and Testing II; (1992) https://doi.org/10.1117/12.134849
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

We have developed a toroidal surface measuring interferometer system. One of the key features of our interferometer system is its ability to measure a toroidal surface without a toroidal wave front and a toroidal reference surface. Our optical system consists of a Fizeau interferometer using a spherical wave front. A cross section figure of the test surface is obtained to analyze interference fringes like a striped bar by using the Fourier transform method. We can then connect each cross section over the entire surface figure by rotation of a rotary table. Results of examination show that the accuracy of our measuring system is better than (lambda) /20 P-V.

Citation Download Citation

Hiroyuki Suhara, Nobuo Sakuma, Seizoh Suzuki, T. Ohsawa, Shin Tsuyuzaki, and Satoru Toyooka "Development of the toroidal surface measuring system", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134849

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