Experimental study of Fe/C multilayer performance: effects of substrate quality and of x-ray irradiation

Eric Ziegler; M. Krisch; L. Vasquez; Jean Susini; Pierre Boher; Philippe Houdy

doi:10.1117/12.51286

1 January 1992 Experimental study of Fe/C multilayer performance: effects of substrate quality and of x-ray irradiation

Eric Ziegler, M. Krisch, L. Vasquez, Jean Susini, Pierre Boher, Philippe Houdy

Proceedings Volume 1547, Multilayer Optics for Advanced X-Ray Applications; (1992) https://doi.org/10.1117/12.51286
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Fe/C multilayers were rf-sputtered on two silicon substrates with substantial difference of surface quality. Microroughness and figure were measured for each substrate before and after layer deposition by using a scanning tunnelling microscope, an optical microscope interferometer, and a Fizeau interferometer. Although the optical quality of both substrates is better than that of current wafers, differences of x-ray reflectivity and peak shape are still observed. The better sample was exposed to an x-ray wiggler beam of 4.6 keV critical energy, so that the multilayer surface received a power density of 5W/mm2 during a 4 hour period, the sample being cooled from the backside. The reflection properties of the sample before and after x ray exposure are compared. At first glance we did not see any significant changes in reflectivity or bandpass, which is very promising for the use of multilayers on high-power synchrotron x-ray beamlines.

Citation Download Citation

Eric Ziegler, M. Krisch, L. Vasquez, Jean Susini, Pierre Boher, and Philippe Houdy "Experimental study of Fe/C multilayer performance: effects of substrate quality and of x-ray irradiation", Proc. SPIE 1547, Multilayer Optics for Advanced X-Ray Applications, (1 January 1992); https://doi.org/10.1117/12.51286

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