PROCEEDINGS VOLUME 1604
11TH ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY | 25-27 SEPTEMBER 1991
11th Annual BACUS Symposium on Photomask Technology
Editor(s): Kevin C. McGinnis
Editor Affiliations +
IN THIS VOLUME

8 Sessions, 26 Papers, 0 Presentations, 0 Posters
Lithography  (6)
Metrology  (1)
11TH ANNUAL BACUS SYMPOSIUM ON PHOTOMASK TECHNOLOGY
25-27 September 1991
Sunnyvale, CA, United States
Data Management
Paul DePesa, Todd E. Pegelow
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56932
Lithography
Maris A. Sturans, Jacek G. Smolinski, Jeffrey A. Robinson
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56933
Jacques Trotel
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56934
Brett Schafman, Claudia H. Geller, C. Edward Franks
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56935
Robert L. Hsieh, Julienne Yu-Hey Lee, Nadim I. Maluf, Raymond Browning, Paul Jerabek, Roger Fabian W. Pease, Gerry Owen
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56936
Katsuhiro Kawasaki, Kazumitsu Nakamura, Takashi Matsuzaka, Hiroya Ohta, Norio Saitou, Toshihiko Kohno, Morihisa Hoga
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56937
Donald M. Tennant, John E. Bjorkholm, Ludwig Eichner, Richard R. Freeman, Tanya E. Jewell, Alastair A. MacDowell, J. Z. Pastalan, L. H. Szeto, Warren K. Waskiewicz, et al.
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56938
Cleaning and Pelliclization
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56939
Robert W. Murphy, James A. Reynolds
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56940
Inspection and Repair
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56941
John M. O'Connor, Zbigniew M. Drozdowicz, James K. Tison
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56942
Brian J. Grenon, Karen D. Badger, Michael J. Trybendis
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56943
Regine G. Tarascon-Auriol, Christophe Pierrat, Michael W. Stohl, Christopher P. Braun, James Burdorf, Sheila Vaidya
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56944
Metrology
Wolfgang Haessler-Grohne, Hans-Helmut Paul
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56945
Phase-Shift Masks
David M. Newmark, Andrew R. Neureuther
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56946
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56947
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56948
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56949
Quality Management
Ord Elliott
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56950
Dennis M. Bradley
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56951
James W. Giffin
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56952
Phase-Shift Masks
Anton K. Pfau, Edward W. Scheckler, David M. Newmark, Andrew R. Neureuther
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56953
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56954
Cleaning and Pelliclization
Joshua Waldman, Rick Wilson
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56955
Frank S. Menagh, Guoqing Xiao, Mircea V. Dusa
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56956
Keynote Address
A. Travis White
Proceedings Volume 11th Annual BACUS Symposium on Photomask Technology, (1992) https://doi.org/10.1117/12.56957
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