Paper
1 February 1992 Controlling horizontal microscale vibration in building floor entablatures
Frank J. Hubach
Author Affiliations +
Abstract
Many vibration sensitive buildings have floors supported by columns without perimeter walls. Consequently, these structures are relatively weak horizontally and behave like a simple table, or entablature, demonstrating an undesirable horizontal resonance. Methods of controlling horizontal microscale vibration in floor entablatures are discussed. Empirical data collected by Frank Hubach Associates, Inc. (FHA) from tests of various building structure configurations are examined to demonstrate techniques of controlling this resonance. Vibration control methods are useful in the design of facilities housing scanning electron-beam microscopes, and other metrology instruments. Initial design treatments can be employed in a straightforward manner, but retro-treatments are nearly impossible because they are fundamental to the basic structure. An FHA design incorporating several vibration control techniques was successful in controlling the horizontal resonance.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank J. Hubach "Controlling horizontal microscale vibration in building floor entablatures", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56841
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Microelectronics

Vibration control

Metrology

Optics manufacturing

Manufacturing

Structural design

Design for manufacturability

RELATED CONTENT


Back to Top