Paper
1 February 1992 Matching performance requirements with technology: an applications approach to vibration isolation
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Abstract
An integrated solutions approach to frequently encountered vibration problems is most useful in solving real-world problems. By ''amalgamating'' several levels of vibration control--in the form of both new designs and existing technologies--one is able to create a foundation upon which a variety of requirements can be met. The combination of time-proven damping of optical bench tops and a novel technological advance involving a new damping technology for pneumatic isolators, leads to enhanced performance of passive isolation systems.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas A. Cellucci "Matching performance requirements with technology: an applications approach to vibration isolation", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56819
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KEYWORDS
Optical isolators

Vibration control

Microelectronics

Metrology

Chlorine

Optical benches

Vibration isolation

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