Electro-optical information processing for optical heterodyne interferometry profilometer

Tao Chen; Li Zhu; Jiabi Chen

doi:10.1117/12.140363

24 April 1992 Electro-optical information processing for optical heterodyne interferometry profilometer

Tao Chen, Li Zhu, Jiabi Chen

Proceedings Volume 1731, Soviet-Chinese Joint Seminar on Holography and Optical Information Processing; (1992) https://doi.org/10.1117/12.140363
Event: Soviet-Chinese Joint Seminar on Holography and Optical Information Processing, 1991, Bishkek, Kirgizstan, Russian Federation

Abstract

In this paper, the method for the electro-optical information processing in the heterodyne profilometer we have made is described. It is based on optical heterodyne interferometry and phase detection techniques. Height variations are less than 1 nm and lateral resolution is less than 2 micrometers . More than ten parameters of surface roughness could be calculated and a real profile of the measured surface could be obtained.

Citation Download Citation

Tao Chen, Li Zhu, and Jiabi Chen "Electro-optical information processing for optical heterodyne interferometry profilometer", Proc. SPIE 1731, Soviet-Chinese Joint Seminar on Holography and Optical Information Processing, (24 April 1992); https://doi.org/10.1117/12.140363

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