Hot-carrier effects in thin-film, p-channel, hydrogen-passivated polysilicon-on-insulator LDD MOSFETs

Swapan Bhattacharya; R. Kovelamudi; S. Batra; M. Lobo; Sanjay K. Banerjee; Bich-Yen Nguyen; Phil J. Tobin

doi:10.1117/12.139356

14 January 1993 Hot-carrier effects in thin-film, p-channel, hydrogen-passivated polysilicon-on-insulator LDD MOSFETs

Swapan Bhattacharya, R. Kovelamudi, S. Batra, M. Lobo, Sanjay K. Banerjee, Bich-Yen Nguyen, Phil J. Tobin

Proceedings Volume 1802, Microelectronics Manufacturing and Reliability; (1993) https://doi.org/10.1117/12.139356
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States

Abstract

Hot-carrier stressing has been shown to degrade hydrogen-passivated p-channel polysilicon-on- oxide MOSFETs by two parallel degradation mechanisms. We observe hot-carrier-induced degradation of hydrogen passivation at grain boundaries through the creation of additional donor-type grain boundary states in the channel, as well as hot-electron trapping in the gate oxide. Due to the presence of both of these degradation mechanisms, p-channel polysilicon MOSFETs exhibit anomalous hot-carrier-induced degradation behavior that has not been observed in bulk p-MOSFETs.

Citation Download Citation

Swapan Bhattacharya, R. Kovelamudi, S. Batra, M. Lobo, Sanjay K. Banerjee, Bich-Yen Nguyen, and Phil J. Tobin "Hot-carrier effects in thin-film, p-channel, hydrogen-passivated polysilicon-on-insulator LDD MOSFETs", Proc. SPIE 1802, Microelectronics Manufacturing and Reliability, (14 January 1993); https://doi.org/10.1117/12.139356

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available