Compact excimer laser system

Dumitru Dragulinescu; Constantin Grigoriu; L. Tobos

doi:10.1117/12.144676

4 May 1993 Compact excimer laser system

Dumitru Dragulinescu, Constantin Grigoriu, L. Tobos

Proceedings Volume 1810, 9th International Symposium on Gas Flow and Chemical Lasers; (1993) https://doi.org/10.1117/12.144676
Event: Ninth International Symposium on Gas Flow and Chemical Lasers, 1992, Heraklion, Greece

Abstract

This paper describes the design and operating characteristics of a KrF laser which operates at variable pulse repetition rates up to 100 pps.

Citation Download Citation

Dumitru Dragulinescu, Constantin Grigoriu, and L. Tobos "Compact excimer laser system", Proc. SPIE 1810, 9th International Symposium on Gas Flow and Chemical Lasers, (4 May 1993); https://doi.org/10.1117/12.144676

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