High-resolution fast-response profilometer based on active stabilized interferometry

Fumio Murakami

doi:10.1117/12.145537

28 May 1993 High-resolution fast-response profilometer based on active stabilized interferometry

Fumio Murakami

Proceedings Volume 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing; (1993) https://doi.org/10.1117/12.145537
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

A noncontact surface profiling technique based on active-stabilized interferometry is described. Direct frequency monitoring by the reference interferometer connected parallel to the sensing interferometer provides high accuracy in nanometer resolution measurement.

Citation Download Citation

Fumio Murakami "High-resolution fast-response profilometer based on active stabilized interferometry", Proc. SPIE 1821, Industrial Applications of Optical Inspection, Metrology, and Sensing, (28 May 1993); https://doi.org/10.1117/12.145537

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