Host-guest effects in the interaction of developers with phenolic resins

Ralph R. Dammel; Mohammad A. Khadim

doi:10.1117/12.154754

15 September 1993 Host-guest effects in the interaction of developers with phenolic resins

Ralph R. Dammel, Mohammad A. Khadim

Proceedings Volume 1925, Advances in Resist Technology and Processing X; (1993) https://doi.org/10.1117/12.154754
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

NMR-spectroscopic evidence is presented for a strong interaction between polyphenolates and various onium ion species (i.e., tetramethylammonium, tetramethylphosphonium and trimethylsulfonium salts). In model compounds, a large decrease in solubility leading to precipitation is observed for a mixed Na/TMA⁺ complex. The formation of onium/phenolate complexes explains such diverse phenomena as the mutual poisoning of metal-ion free and metal ion containing developers, the behavior of developers containing quaternary ammonium surfactants, the anomalous temperature effects observed for tetramethylammonium hydroxide (TMAH) developers, or the dissolution inhibition effect of triarylsulfonium photoacid generators.

Citation Download Citation

Ralph R. Dammel and Mohammad A. Khadim "Host-guest effects in the interaction of developers with phenolic resins", Proc. SPIE 1925, Advances in Resist Technology and Processing X, (15 September 1993); https://doi.org/10.1117/12.154754

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available