Compact precision holographic optical probe

Bao Hua Zhuang; Ji-Hua Zhang; Zhen Li; Keqian Lu

doi:10.1117/12.172608

1 March 1994 Compact precision holographic optical probe

Bao Hua Zhuang, Ji-Hua Zhang, Zhen Li, Keqian Lu

Proceedings Volume 2004, Interferometry VI: Applications; (1994) https://doi.org/10.1117/12.172608
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The purpose of this paper is to describe a new precision displacement sensor--Compact Precision Holographic Optical Probe--with the use of holographic optical element (HOE) technology. It is a novel non-contact method for the measurement and inspection of displacement and surface quality control. The IR HOEs are made by using a computer generated hologram method. A mathematical model has been developed to analyze the performance of the probe. The initial experimental results are obtained. The probe is both compact and inexpensive.

Citation Download Citation

Bao Hua Zhuang, Ji-Hua Zhang, Zhen Li, and Keqian Lu "Compact precision holographic optical probe", Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); https://doi.org/10.1117/12.172608

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