Paper
1 February 1994 Image contrast measurements in the 125-200-Å region
Ann Marie Paula Eligon, William T. Silfvast
Author Affiliations +
Abstract
To date, image contrast in the soft-x-ray spectral region has been determined from the optical constant data for n and k. Uncertainties in these constants obtained from different sources suggest that direct measurement of image contrast would be useful. An experimental arrangement using a laser produced plasma is described for such a direct measurement of image contrast.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ann Marie Paula Eligon and William T. Silfvast "Image contrast measurements in the 125-200-Å region", Proc. SPIE 2015, Applications of Laser Plasma Radiation, (1 February 1994); https://doi.org/10.1117/12.167992
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KEYWORDS
Silicon

Semiconducting wafers

Reflectivity

Gold

Microscopes

Plasma

Multilayers

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