Absolute noncontacting method to characterize x-ray mirrors with large radii with nanometre accuracy

Manohar Virdee

doi:10.1117/12.168067

1 February 1993 Absolute noncontacting method to characterize x-ray mirrors with large radii with nanometre accuracy

Manohar Virdee

Proceedings Volume 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application; (1993) https://doi.org/10.1117/12.168067
Event: Laser Dimensional Metrology: Recent Advances for Industrial Application, 1993, Brighton, United Kingdom

Abstract

A recent development of the slope integration method in the form of a 2-D laser profilometer system has been applied to measure the figure of reflecting mirrors for x-ray imaging applications. The mirror surfaces were either spherical or paraboloid in form and in some cases could be bent into the required form. The lengths of the surfaces examined varied from 35 mm to 500 mm with sagittas of up to 60 micrometers . At present surfaces with a maximum scan length of 300 mm in 1-D can be measured with an estimated systematic uncertainty of +/- 6 nm for flatness. Over the full angular measurement range of 5 arc minutes the accuracy is slightly reduced. In 2-D, flatness over an area of 100 mm X 100 mm can be measured repeatably with a precision of +/- 2 nm. The angular range of the method has been increased to 1 degree(s) in 1-D to cater to surfaces with radii of about 20 m.

Citation Download Citation

Manohar Virdee "Absolute noncontacting method to characterize x-ray mirrors with large radii with nanometre accuracy", Proc. SPIE 2088, Laser Dimensional Metrology: Recent Advances for Industrial Application, (1 February 1993); https://doi.org/10.1117/12.168067

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