Dark-field laser projection microscope in holographic interferometry

A. M. Bakiev; S. Kh. Valiev

doi:10.1117/12.160517

7 October 1993 Dark-field laser projection microscope in holographic interferometry

A. M. Bakiev, S. Kh. Valiev

Proceedings Volume 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications; (1993) https://doi.org/10.1117/12.160517
Event: Metal Vapor Lasers and Their Applications: CIS Selected Papers, 1993, None, Russian Federation

Abstract

We consider the application of active optical systems with metal vapor brightness amplifiers in holographic interferometry. The method is based on the scheme of a laser projection microscope with a dark-field object illumination. It enables one to obtain information about shape and size distortions of object surface topology elements with accuracy up to a fraction of an amplifier radiation wavelength.

Citation Download Citation

A. M. Bakiev and S. Kh. Valiev "Dark-field laser projection microscope in holographic interferometry", Proc. SPIE 2110, CIS Selected Papers: Metal Vapor Lasers and Their Applications, (7 October 1993); https://doi.org/10.1117/12.160517

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