Noninterference method of optical surface roughness measurements

V. V. Kalugin; A. V. Trofimov; V. L. Zuniga

doi:10.1117/12.192001

31 October 1994 Noninterference method of optical surface roughness measurements

V. V. Kalugin, A. V. Trofimov, V. L. Zuniga

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.192001
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

A construction and the action principle of the sensor of the form and position of the light beam is described. On the basis of the two such sensors there has been constructed an apparatus for measuring profiles and roughness of the quasi-mirror surfaces. The inhomogeneities detection was realized by the change of the energy center position of the beam and its form, the beam being reflected from the examined surface. The measurements results are appendixed.

Citation Download Citation

V. V. Kalugin, A. V. Trofimov, and V. L. Zuniga "Noninterference method of optical surface roughness measurements", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.192001

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