Paper
10 June 1994 Monolithic ring lasers for low-noise optical signal distribution
James J. Liang, Joseph M. Ballantyne
Author Affiliations +
Abstract
A self-aligned process is used, for the first time, to fabricate triangular semiconductor ridge ring lasers. Very smooth dry- etched facets have been achieved using chemically assisted ion beam etching, with SiO2 as the etch-mask. The dependence of the threshold current on the ring structure angle is presented. The ring lasers show stronger tendency toward single- longitudinal-mode operation than the Fabry-Perot lasers fabricated on the same wafer. The introduction of an external mirror in the ring laser structure results in highly asymmetric output, which further enhances the side-mode-suppression-ratio.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James J. Liang and Joseph M. Ballantyne "Monolithic ring lasers for low-noise optical signal distribution", Proc. SPIE 2155, Optoelectronic Signal Processing for Phased-Array Antennas IV, (10 June 1994); https://doi.org/10.1117/12.177394
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KEYWORDS
Etching

Fabry–Perot interferometers

Laser optics

Laser damage threshold

Reflectivity

Semiconductor lasers

Lithography

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