Paper
4 November 1994 Optical properties of single-layer and multilayer anisotropic coatings
Ian J. Hodgkinson, Qihong Wu
Author Affiliations +
Proceedings Volume 2253, Optical Interference Coatings; (1994) https://doi.org/10.1117/12.192164
Event: 1994 International Symposium on Optical Interference Coatings, 1994, Grenoble, France
Abstract
Vacuum deposited anisotropic films offer unique optical properties but currently suffer from several problems, including instability and excessive haze. We discuss the use of transmission- mode perpendicular incidence ellipsometry and waveguiding for measuring the birefringent properties of tilted columnar films, and describe an in situ method for measuring anisotropic optical scatter distributions. Our results show that the properties of the films depend on deposition conditions, including substrate temperature.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ian J. Hodgkinson and Qihong Wu "Optical properties of single-layer and multilayer anisotropic coatings", Proc. SPIE 2253, Optical Interference Coatings, (4 November 1994); https://doi.org/10.1117/12.192164
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Cited by 3 scholarly publications.
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KEYWORDS
Oxides

Air contamination

Refractive index

Titanium

Birefringence

In situ metrology

Optical properties

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