Paper
13 October 1994 Amorphous multilayer thin films prepared by the auto-dip-coating technique
Qingle Wu, Yuhuan Xu, John D. Mackenzie
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Abstract
Thin films composed of alternating layers of amorphous barium titanate (BaTiO3) and amorphous silica (SiO2) have been fabricated by the sol-gel technique. Thin films of pure amorphous BaTiO3 were also fabricated by the sol-gel technique for comparison. A special dip-coating and heating apparatus was built in order to coat and fire films of up to 20 layers. The cycles were adjustable and time-controlled. Upon firing to 400 degree(s)C, the films remained amorphous. The thickness and refractive index of each film, varying with concentration of solution, were measured by ellipsometry. The films were characterized by x- ray diffraction, electron diffraction and scanning electron microscopy (SEM). UV-visible absorption spectra of the films also confirmed the multilayered structure.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qingle Wu, Yuhuan Xu, and John D. Mackenzie "Amorphous multilayer thin films prepared by the auto-dip-coating technique", Proc. SPIE 2288, Sol-Gel Optics III, (13 October 1994); https://doi.org/10.1117/12.188985
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KEYWORDS
Multilayers

Ferroelectric materials

Thin films

Sol-gels

Absorption

Scanning electron microscopy

Crystals

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