Microbulk analysis of solid samples by laser ablation on microwave-induced plasma, with optical emission spectroscopy

A. Ciocan; J. Uebbing; L. Hiddemann; Kay Niemax

doi:10.1117/12.203533

8 March 1995 Microbulk analysis of solid samples by laser ablation on microwave-induced plasma with optical emission spectroscopy

A. Ciocan, J. Uebbing, L. Hiddemann, Kay Niemax

Author Affiliations +

Proceedings Volume 2461, ROMOPTO '94: Fourth Conference in Optics; (1995) https://doi.org/10.1117/12.203533
Event: ROMOPTO '94: 4th Conference on Optics, 1994, Bucharest, Romania

Abstract

Laser ablation into a microwave induced plasma coupled with atomic emission spectroscopy can be used for microbulk analysis with moderate spatial resolution, dependent on the laser beam parameters and the solid sample. The application of optical fibers as the interface between an echelle polychromator and a gateable optical multichannel detector allows simultaneous measurements in the range of 180 - 800 nm. By this experimental arrangement, results about concentration distribution, element correlation and ablation process itself in metallic (steel, aluminum) and non-conductive (quartz) samples will be presented.

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A. Ciocan, J. Uebbing, L. Hiddemann, and Kay Niemax "Microbulk analysis of solid samples by laser ablation on microwave-induced plasma with optical emission spectroscopy", Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); https://doi.org/10.1117/12.203533

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