Calculation of aberrations of a space charge lens and its possible applications

Li Wang; Tiantong Tang; Jon Orloff

doi:10.1117/12.221596

25 September 1995 Calculation of aberrations of a space charge lens and its possible applications

Li Wang, Tiantong Tang, Jon Orloff

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221596
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Electron space-charge lenses and spherical aberration correctors are studied theoretically. Many interesting features of space charge devices are revealed by considering some simple, but physically reasonable models. A `toroidal sub-beam' algorithm has been developed to model the evolution of the current and charge density distributions of charged particle beams taking into account space charge and initial thermal velocity effects. It is shown that a number of simple space charge distributions can compensate a large range positive spherical aberrations. Some practical structures of the space charge lenses are presented.

Citation Download Citation

Li Wang, Tiantong Tang, and Jon Orloff "Calculation of aberrations of a space charge lens and its possible applications", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221596

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available