Rigorous theoretical investigation of distortion in ion-projection noncathode systems

Stanislav N. Jatchmenev; Anatoliy I. Shitakov; Igor P. Vykhat

doi:10.1117/12.221619

25 September 1995 Rigorous theoretical investigation of distortion in ion-projection noncathode systems

Stanislav N. Jatchmenev, Anatoliy I. Shitakov, Igor P. Vykhat

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221619
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Calculation technique has been worked out and distortion has been studied in ion optical systems with reduction wide-field image intended to Ion Projection Lithography. It is offered the refined definitions for distortion, fine structure of distortion picture, paraxial system, optimal regime of collimator tuning, which allows us to optimize conditions influencing on distortion value. The criterion of optimization is in maximum work field limited by given value of distortion. Three alternative calculation methods are employed in which third-order and fifth-order distortion is obtained. One is a new approach to the system having collimator and projector. Calculation of electric field is carried out by means of the method of integral equations with calculating derivatives of field functions on axis up to the fourth order which is necessary for fifth-order distortion calculation. Cases of distortion related to perturbation of axial symmetry and their correction and resting members are considered. Rigorous solution of differential equations and analysis of obtained results gives us picture of fine distortion structure with simultaneous presents intrinsic barrel-type and extrinsic pincushion-like areas separated by contour of null-value distortion which due to a deformation in result of presents the fourth-order distortion. Perturbation distortion has been increased in intrinsic area in spite of correction.

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Stanislav N. Jatchmenev, Anatoliy I. Shitakov, and Igor P. Vykhat "Rigorous theoretical investigation of distortion in ion-projection noncathode systems", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221619

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KEYWORDS

Distortion

Projection systems

Collimators

Ions

Photomasks

Projection lithography

Analog electronics

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