Macro lens for emission microscopy

Paul E. Nothnagle; John Robert Zinter; Paul L. Ruben

doi:10.1117/12.216390

11 August 1995 Macro lens for emission microscopy

Paul E. Nothnagle, John Robert Zinter, Paul L. Ruben

Proceedings Volume 2537, Novel Optical Systems Design and Optimization; (1995) https://doi.org/10.1117/12.216390
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Emission microscopy involves post-mortem analysis of integrated circuits. By applying an electric signal to faulty chips, infra-red emission occurs at sites of potential failure. The ability to examine entire chips has not been fully incorporated into the objective design of emission microscopes. This ability allows faster identification of trouble points. After failure-sites have been identified, they are more closely investigated by using higher power microscope objectives. A 0.8X lens having an numerical aperture of the object of 0.32 is discussed. This lens covers an object full field of view of 18.0 X 18.0 mm (diagonal of 25.5 mm) at 50% vignetting, reaching 25 X 25 mm (diagonal 35 mm) at 100% vignetting. Unique features include a 20 mm working distance for the insertion of analytic probes, a 100 mm gap between objective and decollimating lens groups for mounting issues, and a back focal length of 50 mm for introduction of filters, beam splitters and/or other auxiliary optics.

Citation Download Citation

Paul E. Nothnagle, John Robert Zinter, and Paul L. Ruben "Macro lens for emission microscopy", Proc. SPIE 2537, Novel Optical Systems Design and Optimization, (11 August 1995); https://doi.org/10.1117/12.216390

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