Benzocyclobutene as planarization resin for charge-coupled devices

Donald J. Perettie; Michael J. Radler; J. L. Smith

doi:10.1117/12.236122

25 March 1996 Benzocyclobutene as planarization resin for charge-coupled devices

Donald J. Perettie, Michael J. Radler, J. L. Smith

Author Affiliations +

Proceedings Volume 2654, Solid State Sensor Arrays and CCD Cameras; (1996) https://doi.org/10.1117/12.236122
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States

Abstract

Benzocyclobutene (BCB) is a commercial product of The Dow Chemical Company sold under the irade name Cyclocene TM Electronic Resins for use in multi-chip modules and interlayer dielectric applications. New versions of the material are being developed as both overcoat and planarization materials for use in active and passive components of flat panel displays and charge coupled devices. Specifically, BCB has shown excellent results for color filter elements as either an overcoat or undercoat material.

Citation Download Citation

Donald J. Perettie, Michael J. Radler, and J. L. Smith "Benzocyclobutene as planarization resin for charge-coupled devices", Proc. SPIE 2654, Solid State Sensor Arrays and CCD Cameras, (25 March 1996); https://doi.org/10.1117/12.236122

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE