Sputter-deposited c-axis-oriented LiNbO3 thin films on silicon

Songshen Tan; J. Zou; Daniel D. Stancil; Tuviah E. Schlesinger; Michele Migliuolo

doi:10.1117/12.239650

10 May 1996 Sputter-deposited c-axis-oriented LiNbO3 thin films on silicon

Songshen Tan, J. Zou, Daniel D. Stancil, Tuviah E. Schlesinger, Michele Migliuolo

Proceedings Volume 2700, Nonlinear Frequency Generation and Conversion; (1996) https://doi.org/10.1117/12.239650
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

We report on the deposition of c-axis oriented LiNbO₃ planar waveguides on silicon substrates. We have employed a combined SiO₂/Si₃N₄ cladding layer to provide both optical confinement in the LiNbO₃ as well as acting as a barrier layer to prevent Li diffusion into the SiO₂. LiNbO₃ films displaying exclusively the (006) reflection (no other orientations) in x-ray diffraction spectra have been produced. Post deposition rapid thermal annealing has been employed to improve the crystallinity of these films. Optical losses of about 18 dB/cm were measured for these films. We discuss the deposition conditions, the role of the silicon nitride in determining the LiNbO₃ texture, as well as the performance of these layers as planar optical waveguides.

Citation Download Citation

Songshen Tan, J. Zou, Daniel D. Stancil, Tuviah E. Schlesinger, and Michele Migliuolo "Sputter-deposited c-axis-oriented LiNbO3 thin films on silicon", Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); https://doi.org/10.1117/12.239650

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