Paper
17 June 1996 Producibility advances in hybrid uncooled infrared devices II
Robert A. Owen, James F. Belcher, Howard R. Beratan, Steve N. Frank
Author Affiliations +
Abstract
Producibility and factory improvements continue to advance the state-of-the-art in hybrid uncooled infrared detector manufacturing. The emphasis has shifted from proof-of- principle experiments to implementation and refinement in the areas of facilities, statistical process control, wafer level processing, and in the resolution of several key yield problems. Improvements in yield, throughput, and consistency demonstrate the maturation of Texas Instruments' detector factory from a research and development oriented lab to a production facility. Reliability and field testing are also confirming detector suitability to the market. The present discussion addresses these recent developments and their impact on the evolution toward a low cost, infrared detector.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert A. Owen, James F. Belcher, Howard R. Beratan, and Steve N. Frank "Producibility advances in hybrid uncooled infrared devices II", Proc. SPIE 2746, Infrared Detectors and Focal Plane Arrays IV, (17 June 1996); https://doi.org/10.1117/12.243053
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Cited by 19 scholarly publications.
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KEYWORDS
Semiconducting wafers

Sensors

Electrodes

Process control

Readout integrated circuits

Ions

Ceramics

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