Two-coordinate laser measuring system for scanning tunneling and atomic-force microscopes

V. M. Khavinson; L. F. Khavinson

doi:10.1117/12.239864

6 May 1996 Two-coordinate laser measuring system for scanning tunneling and atomic-force microscopes

V. M. Khavinson, L. F. Khavinson

Author Affiliations +

Proceedings Volume 2799, Atomic and Quantum Optics: High-Precision Measurements; (1996) https://doi.org/10.1117/12.239864
Event: International Conference on Coherent and Nonlinear Optics, 1995, St. Petersburg, Russian Federation

Abstract

The optical train and design of an automated two-coordinate laser polarization interferometer to measure linear displacements in the nanometer range are discussed. The interferometer can be used for two-coordinate measurements of displacements of the needle of scanning tunneling or atomic-force microscopes in the study of surface topology.

Citation Download Citation

V. M. Khavinson and L. F. Khavinson "Two-coordinate laser measuring system for scanning tunneling and atomic-force microscopes", Proc. SPIE 2799, Atomic and Quantum Optics: High-Precision Measurements, (6 May 1996); https://doi.org/10.1117/12.239864

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