Sampling-based yield prediction for ULSI

Gerard A. Allan; Anthony J. Walton

doi:10.1117/12.250828

12 September 1996 Sampling-based yield prediction for ULSI

Gerard A. Allan, Anthony J. Walton

Proceedings Volume 2874, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II; (1996) https://doi.org/10.1117/12.250828
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

This paper reports a method for estimating critical areas and hence the yield of ULSI devices using survey sampling techniques. The approach does not suffer from the restrictions of previously reported methods of critical area estimation. In particular its practical application is not limited by the size of the device or the nature of the design hierarchy. The method makes possible, for the first time, efficient and accurate yield predictions of the most complex state-of-the-art devices using modest computing resources.

Citation Download Citation

Gerard A. Allan and Anthony J. Walton "Sampling-based yield prediction for ULSI", Proc. SPIE 2874, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II, (12 September 1996); https://doi.org/10.1117/12.250828

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