Influences of the buffer layer of TiO2-SiO2 composite film prepared by ion-assisted coevaporation on the properties of indium tin oxide layer coated on soda lime glass

Rung-Ywan Tsai; Fang Chung Ho; Mu-Yi Hua

doi:10.1117/12.253331

30 September 1996 Influences of the buffer layer of TiO₂-SiO₂ composite film prepared by ion-assisted coevaporation on the properties of indium tin oxide layer coated on soda lime glass

Rung-Ywan Tsai, Fang Chung Ho, Mu-Yi Hua

Author Affiliations +

Proceedings Volume 2892, Display Devices and Systems; (1996) https://doi.org/10.1117/12.253331
Event: Photonics China '96, 1996, Beijing, China

Abstract

TiO₂-SiO₂ composite films are sandwiched between indium tin oxide (ITO) layer and soda lime glass as a buffer layer. The TiO₂-SiO₂ composite and ITO layers are sequentially deposited on glass substrates by ion-assisted electron-beam evaporation in the same coating chamber. Influences of the TiO₂-SiO₂ composite film with various compositions on the structural, optical, and electrical properties of ITO layer before and after annealing in air at 300 degree(s)C and 500 degree(s)C for 1h are systematically investigated using a x-ray diffractometer, spectrophotometer, and four point probe. Surface roughness of as-deposited and post-annealed samples are measured by talysurface and scanning electron microscopy. Correlations between the electrical properties and the surface roughnesses and structures of ITO coatings are also discussed.

Citation Download Citation

Rung-Ywan Tsai, Fang Chung Ho, and Mu-Yi Hua "Influences of the buffer layer of TiO₂-SiO₂ composite film prepared by ion-assisted coevaporation on the properties of indium tin oxide layer coated on soda lime glass", Proc. SPIE 2892, Display Devices and Systems, (30 September 1996); https://doi.org/10.1117/12.253331

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KEYWORDS

Glasses

Composites

Coating

Annealing

Resistance

Surface roughness

Transmittance

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